Skip To The Main Content

News & Events

Matter Highlights Go Back

Onto Innovation Inc. Announces Strategic Partnership with Rigaku Holdings Corporation

04.21.26

Simpson Thacher is representing Onto Innovation Inc. (“Onto Innovation”) in connection with its strategic collaboration with Rigaku Holdings Corporation (“Rigaku"), a leading manufacturer of X-ray related technologies, to advance next-generation process control solutions for semiconductor manufacturing.

In connection with the strategic collaboration, Simpson Thacher is also representing Onto Innovation in connection with its entry into a definitive share purchase agreement with Atom Investments, L.P., an affiliate of The Carlyle Group, to acquire 27% of the outstanding common stock of Rigaku for approximately $710 million. The transaction is expected to close in the second half of 2026, subject to customary closing conditions, including receipt of customary regulatory approvals.

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that includes un-patterned wafer quality, 3D metrology spanning chip features from nanometer scale transistors to large die interconnects, macro defect inspection of wafers and packages, metal interconnect composition, factory analytics, and lithography for advanced semiconductor packaging.

The Simpson Thacher team includes Joe Conahan, Andy Alin, Elias Rosenblatt, Samuel Goldsmith and Bailey Bartel (M&A); Jonathan Stradling and Kaoruko Sakuramoto (Tokyo – M&A); Katherine Reaves, Elizabeth Kates, Sally Jo and Anilya Krishnan (Banking & Credit); Sunny Cheong and Ryan Poché (Capital Markets); Sara Razi, Preston Miller, Matthew Evola, Maxime Fischer-Zernin and Nathan May (Antitrust); Mark Skerry, Ryan Stalnaker, Feven Yohannes and Peter Tian (Regulatory); and Sophie Staples, Jessica Berman and Jiha Min (Tax).